Sercalo TM Dual-Axes Electrostatic MEMS Mirror

The Sercalo TM is a dual-axes electrostatic MEMS mirror designed for static beam steering. It is built to minimize effects such as drift, hysteresis and temperature-dependent performance. The mirror is driven by an electrostatic comb drive at a tilt angle of up to ±4°, with apertures of up to 2.5 mm.

Electrostatic MEMS mirrors combine the high pointing stability and high fill factor typically required in fiber optic components. Sercalo uses these mirrors in its SC and TF product lines.

Operating principle

The mirror is built as a compact chip that combines the mirror surface, a comb-drive actuator and torsion bars that act as mechanical springs. Electrostatic forces move the mirror. The torsion bars support the mirror and provide a restoring force that stabilizes and limits the rotation for precise positioning.

Electrostatic drive offers strong static performance and is used in fiber optic light processing such as MEMS variable optical attenuators, fiber optic switches and tunable optical filters.

Configuration

The TM is available in a Ø1 mm (size 10) or 2.5 x 2.0 mm (size 2520) mirror size, with gold or aluminum coating. Sercalo also offers custom designs outside the standard product line.